Characterization of Three-Dimensional-Integrated Active Pixel Sensor for X-Ray Detection

Characterization of Three-Dimensional-Integrated Active Pixel Sensor for X-Ray Detection

We have developed a back-illuminated active pixel sensor (APS) which includes an SOI readout circuit and a silicon diode detector array implemented in a separate high-resistivity wafer. Both are connected together using a per-pixel 3-D integration technique developed at Lincoln Laboratory. The devic...

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Bibliographic Details
Main Authors: Bautz, Marshall W. (Contributor), Busacker, David E. (Contributor), Prigozhin, Gregory (Contributor), Suntharalingam, Vyshnavi (Contributor), Foster, Richard F. (Contributor), Kissel, Steve E. (Contributor), La Marr, Beverly J. (Contributor), Soares, Antonio M. (Contributor), Villasenor, Jesus Noel Samonte (Author)
Other Authors: Lincoln Laboratory (Contributor), MIT Kavli Institute for Astrophysics and Space Research (Contributor), Villasenor, Joel (Contributor)
Format: Article
Language:English
Published: IEEE transactions on electron devices, 2010-12-02T22:20:26Z.
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