Measurement results for an x-ray 3D-integrated active pixel sensor

Measurement results for an x-ray 3D-integrated active pixel sensor

We have developed a hybrid Active Pixel Sensor for detecting low energy X-rays. The sensor consists of a silicon diode detector array built on a high resistivity wafer and an SOI CMOS readout circuit, connected together by means of unique 3D integration technology developed at MIT Lincoln Laboratory...

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Bibliographic Details
Main Authors: Prigozhin, Gregory (Contributor), Foster, Richard F. (Contributor), Suntharalingam, Vyshnavi (Contributor), Kissel, Steve E. (Contributor), La Marr, Beverly J. (Contributor), Bautz, Marshall W. (Contributor)
Other Authors: Lincoln Laboratory (Contributor), MIT Kavli Institute for Astrophysics and Space Research (Contributor)
Format: Article
Language:English
Published: SPIE, 2011-02-14T15:06:20Z.
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