Photonic Device Layout Within the Foundry CMOS Design Environment

A design methodology to layout photonic devices within standard electronic complementary metal-oxide-semiconductor (CMOS) foundry data preparation flows is described. This platform has enabled the fabrication of designs in three foundry scaled-CMOS processes from two semiconductor manufacturers.

Bibliographic Details
Main Authors: Orcutt, Jason Scott (Contributor), Ram, Rajeev J. (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers, 2011-03-21T21:17:21Z.
Subjects:
Online Access:Get fulltext
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100 1 0 |a Orcutt, Jason Scott  |e author 
100 1 0 |a Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science  |e contributor 
100 1 0 |a Massachusetts Institute of Technology. Research Laboratory of Electronics  |e contributor 
100 1 0 |a Ram, Rajeev J.  |e contributor 
100 1 0 |a Orcutt, Jason Scott  |e contributor 
100 1 0 |a Ram, Rajeev J.  |e contributor 
700 1 0 |a Ram, Rajeev J.  |e author 
245 0 0 |a Photonic Device Layout Within the Foundry CMOS Design Environment 
260 |b Institute of Electrical and Electronics Engineers,   |c 2011-03-21T21:17:21Z. 
856 |z Get fulltext  |u http://hdl.handle.net/1721.1/61756 
520 |a A design methodology to layout photonic devices within standard electronic complementary metal-oxide-semiconductor (CMOS) foundry data preparation flows is described. This platform has enabled the fabrication of designs in three foundry scaled-CMOS processes from two semiconductor manufacturers. 
520 |a United States. Defense Advanced Research Projects Agency (DARPA) 
520 |a National Science Foundation (U.S.) 
546 |a en_US 
655 7 |a Article 
773 |t IEEE Photonics Technology Letters