Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results

Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results

Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF)...

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Bibliographic Details
Main Authors: Hogan, Thomas J. (Author), Taylor, Stephen (Author), Pedder, Randall E. (Author), Cheung, Kerry (Contributor), Velasquez-Heller, Luis Fernand (Contributor), Akinwande, Akintunde Ibitayo (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Microsystems Technology Laboratories (Contributor), Akinwande, Akintunde I. (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE), 2012-02-03T18:39:54Z.
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