High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry

High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry

We report exciting experimental data from a low-cost, high-performance square electrode quadrupole mass filter with integrated ion optics intended for chips-cale mass spectrometry. The device showed a mass range of 650 amu and a maximum resolution of ~80, metrics that are comparable to the state-of-...

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Bibliographic Details
Main Authors: Cheung, Kerry (Contributor), Velasquez-Heller, Luis Fernand (Contributor), Akinwande, Akintunde Ibitayo (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Microsystems Technology Laboratories (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE), 2012-04-04T18:07:41Z.
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