CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications
We report the fabrication and experimental characterization of a novel low-cost carbon nanotube (CNT)-based electron impact ionizer (EII) with integrated gate for portable mass spectrometry applications. The device achieves low-voltage ionization using sparse forests of plasma-enhanced chemical vapo...
| Main Authors: | , , |
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| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers,
2012-08-08T19:24:18Z.
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| Subjects: | |
| Online Access: | Get fulltext |