Thermal considerations for advanced SOI substrates designed for III-V/Si heterointegration
Silicon-on-lattice engineered substrates (SOLES) are SOI substrates with embedded Ge layers that facilitate III-V compound integration for advanced integrated circuits. The new materials integration scheme in SOLES requires the analysis of its thermal stability and diffusion barrier properties. In t...
Main Authors: | , , , , , , , , , , , , , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
Institute of Electrical and Electronics Engineers (IEEE),
2012-10-01T16:34:32Z.
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Subjects: | |
Online Access: | Get fulltext |