An unreleased mm-wave resonant body transistor

An unreleased mm-wave resonant body transistor

In this work, we present the first fully unreleased Micro-Electro-Mechanical (MEM) resonator. The 1st harmonic longitudinal resonance of a silicon FinFET fully clad in SiO[subscript 2] is demonstrated. The device exhibits two resonances at 39 and 41 GHz, corresponding well with simulation results. T...

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Bibliographic Details
Main Authors: Wang, Wentao (Contributor), Popa, Laura Cornelia (Contributor), Marathe, Radhika A. (Contributor), Weinstein, Dana (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Mechanical Engineering (Contributor), Massachusetts Institute of Technology. Department of Physics (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE), 2012-10-03T18:59:56Z.
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