Air-clad silicon pedestal structures for broadband mid-infrared microphotonics

Air-clad silicon pedestal structures for broadband mid-infrared microphotonics

Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illu...

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Main Authors: Lin, Pao Tai (Contributor), Singh, Vivek (Contributor), Cai, Yan (Contributor), Kimerling, Lionel C. (Contributor), Agarwal, Anuradha Murthy (Contributor)
Other Authors: MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: Optical Society of America, 2013-07-30T18:31:10Z.
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