Air-clad silicon pedestal structures for broadband mid-infrared microphotonics
Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illu...
Main Authors: | Lin, Pao Tai (Contributor), Singh, Vivek (Contributor), Cai, Yan (Contributor), Kimerling, Lionel C. (Contributor), Agarwal, Anuradha Murthy (Contributor) |
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Other Authors: | MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor) |
Format: | Article |
Language: | English |
Published: |
Optical Society of America,
2013-07-30T18:31:10Z.
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Subjects: | |
Online Access: | Get fulltext |
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