Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators

We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5...

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Bibliographic Details
Main Authors: Lin, Hongtao (Author), Li, Lan (Author), Zou, Yi (Author), Danto, Sylvain (Author), Musgraves, J. David (Author), Richardson, Kathleen (Author), Kozacik, Stephen (Author), Murakowski, Maciej (Author), Prather, Dennis (Author), Singh, Vivek (Contributor), Kimerling, Lionel C. (Contributor), Hu, Juejun (Author), Lin, Pao Tai (Contributor), Agarwal, Anuradha Murthy (Contributor)
Other Authors: MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: Optical Society of America, 2013-07-31T14:57:08Z.
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