Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators
We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5...
Main Authors: | , , , , , , , , , , , , , |
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Other Authors: | , |
Format: | Article |
Language: | English |
Published: |
Optical Society of America,
2013-07-31T14:57:08Z.
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Subjects: | |
Online Access: | Get fulltext |