Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators

We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5...

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Main Authors: Lin, Hongtao (Author), Li, Lan (Author), Zou, Yi (Author), Danto, Sylvain (Author), Musgraves, J. David (Author), Richardson, Kathleen (Author), Kozacik, Stephen (Author), Murakowski, Maciej (Author), Prather, Dennis (Author), Singh, Vivek (Contributor), Kimerling, Lionel C. (Contributor), Hu, Juejun (Author), Lin, Pao Tai (Contributor), Agarwal, Anuradha Murthy (Contributor)
Other Authors: MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: Optical Society of America, 2013-07-31T14:57:08Z.
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Online Access:Get fulltext
LEADER 02154 am a22004213u 4500
001 79737
042 |a dc 
100 1 0 |a Lin, Hongtao  |e author 
100 1 0 |a MIT Materials Research Laboratory  |e contributor 
100 1 0 |a Massachusetts Institute of Technology. Department of Materials Science and Engineering  |e contributor 
100 1 0 |a Lin, Pao Tai  |e contributor 
100 1 0 |a Singh, Vivek  |e contributor 
100 1 0 |a Agarwal, Anuradha Murthy  |e contributor 
100 1 0 |a Kimerling, Lionel C.  |e contributor 
700 1 0 |a Li, Lan  |e author 
700 1 0 |a Zou, Yi  |e author 
700 1 0 |a Danto, Sylvain  |e author 
700 1 0 |a Musgraves, J. David  |e author 
700 1 0 |a Richardson, Kathleen  |e author 
700 1 0 |a Kozacik, Stephen  |e author 
700 1 0 |a Murakowski, Maciej  |e author 
700 1 0 |a Prather, Dennis  |e author 
700 1 0 |a Singh, Vivek  |e author 
700 1 0 |a Kimerling, Lionel C.  |e author 
700 1 0 |a Hu, Juejun  |e author 
700 1 0 |a Lin, Pao Tai  |e author 
700 1 0 |a Agarwal, Anuradha Murthy  |e author 
245 0 0 |a Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators 
260 |b Optical Society of America,   |c 2013-07-31T14:57:08Z. 
856 |z Get fulltext  |u http://hdl.handle.net/1721.1/79737 
520 |a We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits. 
520 |a National Science Foundation (U.S.). (Award 1200406) 
520 |a National Science Foundation (U.S.). (EPSCoR Grant EPS-0814251) 
520 |a United States. Dept. of Energy (Contract DE-NA000421) 
520 |a United States. National Nuclear Security Administration (Defense Nuclear Nonproliferation Research and Development) 
546 |a en_US 
655 7 |a Article 
773 |t Optics Letters