Kinetic Monte Carlo simulations of nanocrystalline film deposition
A full diffusion kinetic Monte Carlo algorithm is used to model nanocrystalline film deposition, and study the mechanisms of grain nucleation and microstructure formation in such films. The major finding of this work is that new grain nucleation occurs predominantly on surface peaks. Consequently, d...
| Main Authors: | , |
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| Other Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
American Institute of Physics (AIP),
2013-08-05T16:17:02Z.
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| Subjects: | |
| Online Access: | Get fulltext |