Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process
We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen e...
| Main Authors: | , , , |
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| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Optical Society of America,
2013-10-04T13:45:22Z.
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| Subjects: | |
| Online Access: | Get fulltext |