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81305 |
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|a Sun, Rong
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|a Massachusetts Institute of Technology. Department of Materials Science and Engineering
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|a Massachusetts Institute of Technology. Microphotonics Center
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|a Sun, Rong
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|a Cheng, Jing
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|a Michel, Jurgen
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|a Kimerling, Lionel C.
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|a Cheng, Jing
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|a Michel, Jurgen
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|a Kimerling, Lionel C.
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|a Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process
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|b Optical Society of America,
|c 2013-10-04T13:45:22Z.
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|z Get fulltext
|u http://hdl.handle.net/1721.1/81305
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|a We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen encapsulation for process integration of a-Si waveguide cores. At 1550 nm , the average measured transmission loss coefficient is 2.5±0.1 dB/cm for the TE mode, comparable with high-quality single crystalline silicon counterparts. The racetrack resonators have mid- 10[superscript 4] to 10[superscript 5] quality factors (Q) and extinction ratios as high as 25 dB .
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|a en_US
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|a Article
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|t Optics Letters
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