Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer

Transparent amorphous silicon channel waveguides with silicon nitride intercladding layer

We have experimentally demonstrated single mode amorphous silicon channel waveguides with low optical transmission loss of 2.7±0.4 dB/cm for TE mode in the 1550 nm range. This result was achieved by using hydrogen passivation of a-Si dangling bonds and a thin, low loss silicon nitride intercladding...

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Bibliographic Details
Main Authors: Sun, Rong (Contributor), McComber, Kevin A. (Contributor), Cheng, Jing (Contributor), Sparacin, Daniel K. (Contributor), Beals, Mark A. (Contributor), Michel, Jurgen (Contributor), Kimerling, Lionel C. (Contributor)
Other Authors: MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Massachusetts Institute of Technology. Microphotonics Center (Contributor)
Format: Article
Language:English
Published: American Institute of Physics, 2013-10-04T16:13:59Z.
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