Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films

Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films

The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for som...

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Bibliographic Details
Main Authors: Gotrik, Kevin W. (Contributor), Tavakkoli Kermani Ghariehali, Amir (Contributor), Hannon, Adam F. (Contributor), Alexander-Katz, Alfredo (Contributor), Ross, Caroline A. (Contributor), Berggren, Karl K. (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: American Association for the Advancement of Science (AAAS), 2014-04-07T19:47:07Z.
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