Reactive ion etching: Optimized diamond membrane fabrication for transmission electron microscopy

Reactive ion etching: Optimized diamond membrane fabrication for transmission electron microscopy

Commonly used preparation method for thin diamond membranes by focused ion beam (FIB) techniques results in surface damage. Here, the authors introduce an alternative method based on reactive ion etching (RIE). To compare these methods, cross-sectional samples are produced in single crystal diamond,...

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Bibliographic Details
Main Authors: Li, Luozhou (Author), Trusheim, Matthew (Author), Gaathon, Ophir (Author), Kisslinger, Kim (Author), Cheng, Ching-Jung (Author), Lu, Ming (Author), Su, Dong (Author), Yao, Xinwen (Author), Huang, Hsu-Cheng (Author), Bayn, Igal (Contributor), Wolcott, Abraham (Author), Osgood, Richard M. (Author), Englund, Dirk Robert (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor)
Format: Article
Language:English
Published: American Vacuum Society (AVS), 2014-04-14T16:01:53Z.
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