Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient

Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient

A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a litho...

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Main Authors: Singer, Jonathan P. (Contributor), Michel, Jurgen (Contributor), Thomas, Edwin L. (Author), Lin, Pao Tai (Contributor), Kooi, Steven E (Author), Kimerling, Lionel C (Author)
Other Authors: Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies (Contributor), MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Kooi, Steven Earl (Contributor), Kimerling, Lionel C. (Contributor)
Format: Article
Language:English
Published: Wiley Blackwell, 2014-09-10T15:48:37Z.
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