Design rules for self-assembled block copolymer patterns using tiled templates

Design rules for self-assembled block copolymer patterns using tiled templates

Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systemati...

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Main Authors: Chang, Jae-Byum (Contributor), Choi, Hong Kyoon (Contributor), Hannon, Adam F. (Contributor), Alexander-Katz, Alfredo (Author), Ross, Caroline A. (Contributor), Berggren, Karl K (Author)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Program in Media Arts and Sciences (Massachusetts Institute of Technology) (Contributor), Alfredo-Katz, Alfredo (Contributor), Berggren, Karl K. (Contributor)
Format: Article
Language:English
Published: Nature Publishing Group, 2015-01-06T18:48:18Z.
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