High resolution fabrication of nanostructures using controlled proximity nanostencil lithography
Nanostencil lithography has a number of distinct benefits that make it an attractive nanofabrication processes, but the inability to fabricate features with nanometer precision has significantly limited its utility. In this paper, we describe a nanostencil lithography process that provides sub-15 nm...
| Main Authors: | , , , |
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| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
American Institute of Physics (AIP),
2015-10-27T16:09:26Z.
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| Subjects: | |
| Online Access: | Get fulltext |