Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators
As technology advances and engineering capabilities improve, more research has focused on microscopic possibilities. Microelectromechanical systems (MEMS) is one area that has received much attention recently. Within MEMS much research has focused on sensing and actuation. This thesis presents work...
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| Format: | Others |
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BYU ScholarsArchive
2008
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| Online Access: | https://scholarsarchive.byu.edu/etd/1528 https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2527&context=etd |