Off-axis Stiffness and Piezroresistive Sensing in Large-displacement Linear-motion Microelectromechanical Systems
Proper positioning of Microelectromechanical Systems (MEMS) components influences the functionality of the device, especially in devices where the motion is in the range of hundreds of micrometers. There are two main obstacles to positioning: off-axis displacement, and position determination. This w...
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| Format: | Others |
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BYU ScholarsArchive
2009
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| Online Access: | https://scholarsarchive.byu.edu/etd/1900 https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2899&context=etd |