Development of Single-Chip Silicon Photonic Microcantilever Arrays for Sensing Applications

Microcantilever arrays have been shown to be promising label-free nanomechanical sensing devices with high sensitivity. Two factors that affect the usefulness of microcantilevers in sensing scenarios are the sensitivity of the transduction method for measuring changes in microcantilever properties a...

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Bibliographic Details
Main Author: Hu, Weisheng
Format: Others
Published: BYU ScholarsArchive 2011
Subjects:
Online Access:https://scholarsarchive.byu.edu/etd/2610
https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=3609&context=etd