Chemical Vapor Deposition of Silanes and Patterning on Silicon
Self assembled monolayers (SAMs) are widely used for surface modification. Alkylsilane monolayers are one of the most widely deposited and studied SAMs. My work focuses on the preparation, patterning, and application of alkysilane monolayers. 3-aminopropyltriethoxysilane (APTES) is one of the most p...
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| Format: | Others |
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BYU ScholarsArchive
2010
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| Online Access: | https://scholarsarchive.byu.edu/etd/2902 https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=3901&context=etd |