Preserving Optical Confinement in PECVD SiO<sub>2</sub> Waveguides by Control of Thin-Film Stress

Researchers at Brigham Young University (BYU) have developed an optical biosensor that can quickly analyze a sample to detect any type of nucleic acid based organism, such as viruses or bacteria. The biosensor's reliability over time is compromised due to water absorbing into the SiO2 waveguid...

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Bibliographic Details
Main Author: Hammon, Steven Jay
Format: Others
Published: BYU ScholarsArchive 2017
Subjects:
Online Access:https://scholarsarchive.byu.edu/etd/6288
https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=7288&amp;context=etd