Anodic aluminum oxide processing, characterization and application to DNA hybridization electrical detection

Metal oxides have recently come under study thanks to their physical and electrical properties for different applications such as MOS devices, i.e. substituting the silicon oxide with a high-k material, or as MIM (Metal Insulator Metal) capacitors, to increase capacitance per unit area and circuit i...

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Bibliographic Details
Main Author: Moreno Hagelsieb, Luis
Format: Others
Language:en
Published: Universite catholique de Louvain 2007
Subjects:
MIM
Online Access:http://edoc.bib.ucl.ac.be:81/ETD-db/collection/available/BelnUcetd-07092007-101924/