Anodic aluminum oxide processing, characterization and application to DNA hybridization electrical detection
Metal oxides have recently come under study thanks to their physical and electrical properties for different applications such as MOS devices, i.e. substituting the silicon oxide with a high-k material, or as MIM (Metal Insulator Metal) capacitors, to increase capacitance per unit area and circuit i...
Main Author: | |
---|---|
Format: | Others |
Language: | en |
Published: |
Universite catholique de Louvain
2007
|
Subjects: | |
Online Access: | http://edoc.bib.ucl.ac.be:81/ETD-db/collection/available/BelnUcetd-07092007-101924/ |