Parylene for MEMS applications
The goal of this thesis is to utilize Parylene, a room-temperature chemical-vapor-deposited (CVD) polymer, for MicroElectroMechanical Systems (MEMS) applications. The identified unique properties of Parylene are used to fabricate various micromachining devices such as thermopneumatic microvalve, in-...
Main Author: | |
---|---|
Format: | Others |
Language: | en |
Published: |
2002
|
Online Access: | https://thesis.library.caltech.edu/2944/1/Yao_t-j_2002.pdf Yao, Tze-Jung (2002) Parylene for MEMS applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/caxb-sr18. https://resolver.caltech.edu/CaltechETD:etd-07202004-135306 <https://resolver.caltech.edu/CaltechETD:etd-07202004-135306> |
Internet
https://thesis.library.caltech.edu/2944/1/Yao_t-j_2002.pdfYao, Tze-Jung (2002) Parylene for MEMS applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/caxb-sr18. https://resolver.caltech.edu/CaltechETD:etd-07202004-135306 <https://resolver.caltech.edu/CaltechETD:etd-07202004-135306>