Evolutionary techniques applied to mask-layout synthesis in micro-mechanical-electronic systems (MEMS)
This thesis reports an automatic method for synthesizing MEMS mask-layouts. This method incorporates a forward simulation of fabrication into a general evolutionary algorithm loop. An initial random population of mask-layouts is generated. The fabrication of each layout is simulated through a digita...
Internet
https://thesis.library.caltech.edu/3400/1/Li_h_1999.pdfLi, Hui (1999) Evolutionary techniques applied to mask-layout synthesis in micro-mechanical-electronic systems (MEMS). Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/000q-7m05. https://resolver.caltech.edu/CaltechETD:etd-09092005-131242 <https://resolver.caltech.edu/CaltechETD:etd-09092005-131242>