Cavity Optomechanics with High Stress Silicon Nitride Films
<p>There has been a barrage of interest in recent years to marry the fields of nanomechanics and quantum optics. Mechanical systems provide sensitive and scalable architectures for sensing applications ranging from atomic force microscopy to gravity wave interferometry. Optical resonators dri...
Internet
https://thesis.library.caltech.edu/7162/2/DJW_thesis_draft_final.pdfWilson, Dalziel Joseph (2012) Cavity Optomechanics with High Stress Silicon Nitride Films. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/VB3C-1G76. https://resolver.caltech.edu/CaltechTHESIS:06122012-123343193 <https://resolver.caltech.edu/CaltechTHESIS:06122012-123343193>