Study of Solid-Phase Reactions of metals on GaAs
To make stable and reproducible contacts to GaAs, metals which react with GaAs in the solid-phase should be favored. In this study, contacts formed employing Pd/TiN/Pd/Ag, Pd:Mg/TiN/Pd:Mg/Ag and Ru/TiN/Ru/Ag are studied. The TiN layer is included to investigate its application as diffusion barrier...
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Format: | Others |
Language: | en |
Published: |
1985
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Online Access: | https://thesis.library.caltech.edu/8694/1/Liew_b-k_1985.pdf Liew, Boon-Khim (1985) Study of Solid-Phase Reactions of metals on GaAs. Senior thesis (Major), California Institute of Technology. doi:10.7907/pay8-6h38. https://resolver.caltech.edu/CaltechTHESIS:10152014-085619478 <https://resolver.caltech.edu/CaltechTHESIS:10152014-085619478> |
Internet
https://thesis.library.caltech.edu/8694/1/Liew_b-k_1985.pdfLiew, Boon-Khim (1985) Study of Solid-Phase Reactions of metals on GaAs. Senior thesis (Major), California Institute of Technology. doi:10.7907/pay8-6h38. https://resolver.caltech.edu/CaltechTHESIS:10152014-085619478 <https://resolver.caltech.edu/CaltechTHESIS:10152014-085619478>