The role of stress and diffusion in structure formation in semiconductors
This dissertation addresses two aspects of the theory and simulation of stress-diffusion coupling in semiconductors. The first part is a study of the role of kinetics in the formation of pits in stressed thin films. The second part describes how atomic-scale calculations can be used to extract the t...
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| Language: | ENG |
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2004
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| Online Access: | http://tel.archives-ouvertes.fr/tel-00006255 http://tel.archives-ouvertes.fr/docs/00/04/68/68/PDF/tel-00006255.pdf |