Caractérisation électrique et modélisation des transistors à effet de champ de faible dimensionnalité
At the beginning of this thesis, basic and advanced device fabrication process which I haveexperienced during study such as top-down and bottom-up approach for the nanoscale devicefabrication technique have been described. Especially, lithography technology has beenfocused because it is base of the...
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Université de Grenoble
2011
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| Online Access: | http://tel.archives-ouvertes.fr/tel-00767413 http://tel.archives-ouvertes.fr/docs/00/76/74/13/PDF/JaewooLEE_Thesis1.pdf |