Scheduling and Advanced Process Control in semiconductor Manufacturing

Scheduling and Advanced Process Control in semiconductor Manufacturing

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In this thesis, we discussed various possibilities of integrating scheduling decisions with information and constraints from Advanced Process Control (APC) systems in semiconductor Manufacturing. In this context, important questions were opened regarding the benefits of integrating scheduling and AP...

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Bibliographic Details
Main Author: Obeid, Ali
Language:ENG
Published: Ecole Nationale Supérieure des Mines de Saint-Etienne 2012
Subjects:
[SPI:OTHER] Engineering Sciences/Other
Scheduling
Advanced process control
Parallel machines
Semiconductor manufacturing
Time constraints
Health indicators
Integer linear programming
Heuristics
Online Access:http://tel.archives-ouvertes.fr/tel-00847032
http://tel.archives-ouvertes.fr/docs/00/84/70/32/PDF/ThesisFinal.pdf

Internet

http://tel.archives-ouvertes.fr/tel-00847032
http://tel.archives-ouvertes.fr/docs/00/84/70/32/PDF/ThesisFinal.pdf

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