Maskless Projection Lithography
Photolithography is a key element of the modem integrated circuit process. It is photolithography, combined with metal deposition, that allows a three dimensional circuit to be built up on a two dimensional surface. Since it is such an important part of the semiconductor manufacturing industry, a...
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Scholarship @ Claremont
2003
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| Online Access: | http://scholarship.claremont.edu/pomona_theses/17 http://scholarship.claremont.edu/cgi/viewcontent.cgi?article=1016&context=pomona_theses |