Piezoelectric thin film actuation of RF MEMS devices
This thesis investigates the piezoelectric thin film actuation of RF MEMS devices. lt is demonstrated that piezoelectric actuation using silicon structures with integrated PZT thin film is suitable for RF MEMS switches and mechanical filters. Both these devices are studied, fabricated and tested. To...
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| Language: | en |
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Cranfield University
2016
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| Online Access: | http://dspace.lib.cranfield.ac.uk/handle/1826/10442 |