Frequenzselektive Vibrationssensoren mit spannungsgesteuerter Resonanzabstimmung in Oberflächenmikromechanik

Frequenzselektive Vibrationssensoren mit spannungsgesteuerter Resonanzabstimmung in Oberflächenmikromechanik

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Basic resonator structures for frequency-selective capacitive vibration sensors which exploit their mechanical resonance peak for spectral selectivity are developed and analyzed. As an important capability, the stuctures offer voltage-controlled frequency tuning realized by electrostatic principles....

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Bibliographic Details
Main Author: Wibbeler, Jürgen
Other Authors: Dötzel, Wolfram
Format: Doctoral Thesis
Language:German
Published: 2003
Subjects:
info:eu-repo/classification/ddc/620
ddc:620
Großsignalverhalten
Kapazitiver Sensor
Mikromechanik
Nichtlineare Schwingung
Resonanz
Vibrationssensor
Frequenzabstimmung
MEMS
Spektrumanalyse
Verschleißüberwachung
capacitive sensor
frequency tuning
large signal response
nonlinear oscillation
resonance
spectrum analysis
stress-stiffening
vibration sensor
wear monitoring
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366
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http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366
https://monarch.qucosa.de/id/qucosa%3A18071
https://monarch.qucosa.de/api/qucosa%3A18071/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18071/attachment/ATT-1/

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