Alternatives Antriebs-und Auswerteverfahren für die Mikrosystemtechnik

Alternatives Antriebs-und Auswerteverfahren für die Mikrosystemtechnik

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In this paper the development, the fabrication and the experimental characterisation of a novel electrodynamic-driven micro-actuator for in plane motions and a novel vertical field effect transistor (vertical FET) is presented. The micro-actuator for motion is based on the Lorentz force generated b...

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Bibliographic Details
Main Author: Buschnakowski, Stephan
Other Authors: Ebest, Gunter
Format: Doctoral Thesis
Language:German
Published: 2004
Subjects:
info:eu-repo/classification/ddc/620
ddc:620
Feldeffekt
Mikromechanik
Simulation
Aktoren
Arrays
Bewegungsdetektion
Mikromanipulation
Sensoren
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401542
https://monarch.qucosa.de/id/qucosa%3A18229
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https://monarch.qucosa.de/api/qucosa%3A18229/attachment/ATT-1/

Internet

http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401542
https://monarch.qucosa.de/id/qucosa%3A18229
https://monarch.qucosa.de/api/qucosa%3A18229/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18229/attachment/ATT-1/

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