Alternatives Antriebs-und Auswerteverfahren für die Mikrosystemtechnik
In this paper the development, the fabrication and the experimental characterisation of a novel electrodynamic-driven micro-actuator for in plane motions and a novel vertical field effect transistor (vertical FET) is presented. The micro-actuator for motion is based on the Lorentz force generated b...
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Format: | Doctoral Thesis |
Language: | German |
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2004
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Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401542 https://monarch.qucosa.de/id/qucosa%3A18229 https://monarch.qucosa.de/api/qucosa%3A18229/attachment/ATT-0/ https://monarch.qucosa.de/api/qucosa%3A18229/attachment/ATT-1/ |