Ultrathin CaTiO3 Capacitors: Physics and Application
Scaling of electronic circuits from micro- to nanometer size determined the incredible development in computer technology in the last decades. In charge storage capacitors that are the largest components in dynamic random access memories (DRAM), dielectrics with higher permittivity (high-k) were nee...
Main Author: | |
---|---|
Other Authors: | |
Format: | Doctoral Thesis |
Language: | English |
Published: |
Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden
2014
|
Subjects: | |
Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-144522 http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-144522 http://www.qucosa.de/fileadmin/data/qucosa/documents/14452/Dissertation_AK.pdf |