Ultrathin CaTiO3 Capacitors: Physics and Application

Scaling of electronic circuits from micro- to nanometer size determined the incredible development in computer technology in the last decades. In charge storage capacitors that are the largest components in dynamic random access memories (DRAM), dielectrics with higher permittivity (high-k) were nee...

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Bibliographic Details
Main Author: Krause, Andreas
Other Authors: Technische Universität Dresden, Fakultät Elektrotechnik und Informationstechnik
Format: Doctoral Thesis
Language:English
Published: Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden 2014
Subjects:
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-144522
http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-144522
http://www.qucosa.de/fileadmin/data/qucosa/documents/14452/Dissertation_AK.pdf