Entwicklung eines hybrid-integrierten Gitterspektrometers basierend auf einem mikro-opto-elektro-mechanischen Bauelement

The subject of this thesis is the development of a hybrid-integrated scanning grating spectrometer based on a micro-opto-electro-mechanical device or a micro-opto-electromechanical system, respectively. Features of spectral measurement system to be emphasized are a miniaturized construction with the...

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Bibliographic Details
Main Author: Pügner, Tino
Other Authors: Technische Universität Dresden, Fakultät Elektrotechnik und Informationstechnik
Format: Doctoral Thesis
Language:deu
Published: Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden 2016
Subjects:
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-197435
http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-197435
http://www.qucosa.de/fileadmin/data/qucosa/documents/19743/Promotionsschrift.pdf