Acoustic Simulation and Characterization of Capacitive Micromachined Ultrasonic Transducers (CMUT)

Acoustic Simulation and Characterization of Capacitive Micromachined Ultrasonic Transducers (CMUT)

Ultrasonic transducers are used in many fields of daily life, e.g. as parking aids or medical devices. To enable their usage also for mass applications small and low- cost transducers with high performance are required. Capacitive, micro-machined ultrasonic transducers (CMUT) offer the potential, fo...

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Bibliographic Details
Main Author: Klemm, Markus
Other Authors: Technische Universität Dresden, Fakultät Elektrotechnik und Informationstechnik
Format: Doctoral Thesis
Language:English
Published: Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden 2017
Subjects:
CMUT
Ultraschallwandler
Akustische Simulation
Struktur-Fluid-Kopplung
Akustische Optimierung
Impedanz
Schallfeld
Waferlevel-Test
Ultrasound
Acoustic Simulation
Structure Fluid interaction
Design Optimization
Soundfield
Sensitivity
Impedance
Lumped Circuits
CMUT Applications
ddc:621.3
rvk:ZN 6810
rvk:ZN 3750
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-225933
http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-225933
http://www.qucosa.de/fileadmin/data/qucosa/documents/22593/2017_KLEMM_Acoustic_Simulation_Characterization_CMUT_Full_PDFA.pdf

Internet

http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-225933
http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-225933
http://www.qucosa.de/fileadmin/data/qucosa/documents/22593/2017_KLEMM_Acoustic_Simulation_Characterization_CMUT_Full_PDFA.pdf

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