Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO2

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The thermal atomic layer deposition (ALD) of copper oxide films from the non-fluorinated yet liquid precursor bis(tri-<it>n</it>-butylphosphane)copper(I)acetylacetonate, [(<sup><it>n</it></sup>Bu<sub>3</sub>P)<sub>2</sub>Cu(acac)], and...

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Bibliographic Details
Main Authors: Waechtler, Thomas, Oswald, Steffen, Roth, Nina, Jakob, Alexander, Lang, Heinrich, Ecke, Ramona, Schulz, Stefan E., Gessner, Thomas, Moskvinova, Anastasia, Schulze, Steffen, Hietschold, Michael
Other Authors: TU Chemnitz, Fakultät für Naturwissenschaften
Format: Article
Language:English
Published: Universitätsbibliothek Chemnitz 2009
Subjects:
Atomic Layer Deposition (ALD)
Atomic force microscopy (AFM)
Beta-Diketonate
Copper Oxide
Copper(I)
Damascene
Diffusion Barrier
Electron diffraction
Electron energy loss spectroscopy (EELS)
Interconnect
Metallization
Scanning electron microscopy (SEM)
Silicon Oxide
Spectroscopic ellipsometry
Tantalum
Tantalum Nitride
Transmission electron microscopy (TEM)
Vapor Pressure
X-ray photoelectron spectroscopy (XPS)
ddc:540
ddc:530
ddc:620
ddc:660
Atomschichtepitaxie
Dampfdruckkurve
Diffusionsbarriere
Diketonate <beta>
Durchstrahlungselektronenmikroskopie
Elektronen-Energieverlustspektroskopie
Elektronenbeugung
Ellipsometrie
Kraftmikroskopie
Kupferkomplexe
Kupferoxide
Metallisieren
Metallisierungsschicht
Phosphane
Rasterelektronenmikroskop
Ruthenium
Röntgen-Photoelektronenspektroskopie
Siliciumdioxid
Tantal
Tantalnitride
ULSI
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:ch1-200900734
http://nbn-resolving.de/urn:nbn:de:bsz:ch1-200900734
http://www.qucosa.de/fileadmin/data/qucosa/documents/5795/data/JES_Postprint.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/5795/20090073.txt

Internet

http://nbn-resolving.de/urn:nbn:de:bsz:ch1-200900734
http://nbn-resolving.de/urn:nbn:de:bsz:ch1-200900734
http://www.qucosa.de/fileadmin/data/qucosa/documents/5795/data/JES_Postprint.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/5795/20090073.txt

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