Growth of carbon nanotubes on different support/catalyst systems for advanced interconnects in integrated circuits

Growth of carbon nanotubes on different support/catalyst systems for advanced interconnects in integrated circuits

Since there is a continuous shrinking of feature sizes in ultra-large scale integrated (ULSI) circuits, requirements on materials and technology are going to rise dramatically in the near future. In particular, at the interconnect system this calls for new concepts and materials. Therefore, carbon n...

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Bibliographic Details
Main Author: Hermann, Sascha
Other Authors: Technische Universität Chemnitz, Elektrotechnik und Informationstechnik
Format: Doctoral Thesis
Language:English
Published: Universitätsbibliothek Chemnitz 2011
Subjects:
Chemische Gasphasenabscheidung (CVD)
Katalysator
Kohlenstoffnanoröhren (CNT)
Grenzfläche
Interaktion
vertikal ausgerichtete CNT (VACNT)
CNT-Zwischenschichtstruktur (ICNT)
selektive CVD
Wachstumskontrolle
Nanopartikel
Integrierter Schaltkreis (IC)
Leitbahn
Via
ULSI
Chemical vapor deposition (CVD)
Catalyst
Carbon Nanotube (CNT)
Interface
Interaction
Vertically Aligned CNT (VACNT)
Interlayer CNT (ICNT)
site-selective CVD
Nanoparticle
Integrated Circuit (IC)
Interconnect
ddc:620
ddc:540
ddc:530
CVD-Verfahren
Kohlenstoff-Nanoröhre
Integrierte Schaltung
Elektronisches Bauelement
Mikroelektronik
Integration <Mikroelektronik>
Tantal
Nickel
Chrom
Dünne Schicht
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-78189
http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-78189
http://www.qucosa.de/fileadmin/data/qucosa/documents/7818/Dissertation_Sascha_Hermann.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/7818/signatur.txt.asc

Internet

http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-78189
http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-78189
http://www.qucosa.de/fileadmin/data/qucosa/documents/7818/Dissertation_Sascha_Hermann.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/7818/signatur.txt.asc

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