Optimierung des XRD 3000PTS für Diffraktometrie und Reflektometrie an dünnen Schichten
Thin films become more and more important in science and industry. The main objective of this work was the expanding of the measurement capabilities of the XRD 3000PTS to the field of thin films. The success of the changes was documented by maesurements on TiC thin films. === Dünne Schichten gewinne...
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Format: | Dissertation |
Language: | deu |
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Universitätsbibliothek Chemnitz
2004
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Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200400621 http://nbn-resolving.de/urn:nbn:de:swb:ch1-200400621 http://www.qucosa.de/fileadmin/data/qucosa/documents/4818/data/diplomarbeit.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/4818/20040062.txt |