Modellierung, Reglerentwurf und Praxistest eines hochdynamischen MEMS-Präzisionsbeschleunigungssensors

Modellierung, Reglerentwurf und Praxistest eines hochdynamischen MEMS-Präzisionsbeschleunigungssensors

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This paper presents the development of building up a controlled MEMS acceleration sensor. The first samples have archived a resolution of better than 500 ug and a bandwidth of more than 200 Hz. A theoretical model is built from the physical principles of the complete sensor system, consisting of the...

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Bibliographic Details
Main Author: Wolfram, Heiko
Other Authors: TU Chemnitz, Fakultät für Elektrotechnik und Informationstechnik
Format: Others
Language:deu
Published: Universitätsbibliothek Chemnitz 2005
Subjects:
H-Infinity Control
MEMS
Mixed-Sensitivity Approach
ddc:620
Beschleunigungssensor
Identifikation
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200500304
http://nbn-resolving.de/urn:nbn:de:swb:ch1-200500304
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/index.html
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/bibentry.txt
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/iisfraunhofer.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/iisfraunhofer.ps.gz
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/20050030.txt

Internet

http://nbn-resolving.de/urn:nbn:de:swb:ch1-200500304
http://nbn-resolving.de/urn:nbn:de:swb:ch1-200500304
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/index.html
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/bibentry.txt
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/iisfraunhofer.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/data/iisfraunhofer.ps.gz
http://www.qucosa.de/fileadmin/data/qucosa/documents/4953/20050030.txt

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