RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends

RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends

This dissertation deals with the development of RF MEMS switches with novel materials and micromachining techniques for the RF and microwave applications. To enable the integration of RF and microwave components on CMOS grade silicon, finite ground coplanar waveguide transmission line on CMOS grade...

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Bibliographic Details
Main Author: Wang, Guoan
Format: Others
Language:en_US
Published: Georgia Institute of Technology 2007
Subjects:
CMOS grade Silicon
Micromachining techniques
LCP
BST
Photodefinable
Novel dielectric materials
RF MEMS switch
SOC/SOP
Dielectrics
Microwave devices
Micromachining
Online Access:http://hdl.handle.net/1853/14112

Internet

http://hdl.handle.net/1853/14112

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