The use of polyimide for the development of micromachined materials, processes and devices

The use of polyimide for the development of micromachined materials, processes and devices

Bibliographic Details
Main Author: Frazier, Albert Bruno
Published: Georgia Institute of Technology 2007
Subjects:
Polyimides
Micromechanics
Online Access:http://hdl.handle.net/1853/15696

Internet

http://hdl.handle.net/1853/15696

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