Unconventional Microfabrication Using Polymers
Current microfabrication materials include silicon, a wide variety of metals, dielectrics, and some polymers. Because of the low cost and high processing flexibility that polymers generally have, expanding the use of polymers in microfabrication would benefit the microfabrication community, enablin...
| Main Author: | |
|---|---|
| Published: |
Georgia Institute of Technology
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/19845 |