Processing of low permittivity silica thin films
Main Author: | |
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Published: |
Georgia Institute of Technology
2008
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Online Access: | http://hdl.handle.net/1853/20032 |
Main Author: | |
---|---|
Published: |
Georgia Institute of Technology
2008
|
Subjects: | |
Online Access: | http://hdl.handle.net/1853/20032 |