Comparative study of the transmission ellipsometric function contours and the Smith chart

Transmission ellipsometry is governed by the transmission ellipsometric function (TEF) of a film-substrate system. The function can be analyzed through a series of constant-thickness contours and constant-angle-of-incidence contours in the complex plane. It has been observed that these TEF contours...

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Bibliographic Details
Main Author: Berzett, Wade A.
Language:en_US
Published: Georgia Institute of Technology 2008
Subjects:
Online Access:http://hdl.handle.net/1853/24901