Comparative study of the transmission ellipsometric function contours and the Smith chart
Transmission ellipsometry is governed by the transmission ellipsometric function (TEF) of a film-substrate system. The function can be analyzed through a series of constant-thickness contours and constant-angle-of-incidence contours in the complex plane. It has been observed that these TEF contours...
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| Language: | en_US |
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Georgia Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1853/24901 |